Dr. Ivo Utke - Personal Page


Ivo Utke is head of the Low Dimensional Materials Team at the Laboratory of Mechanics for Materials and Nanostructures at EMPA. He received his diploma in Materials Science and his PhD degree in Natural Sciences at the Humboldt University in Berlin in 1991 and 1995, respectively. He joined the Swiss Federal Institute of Technology Lausanne, Switzerland in 1995 as a post-doc with a German Academic Exchange Service (DAAD) scholarship. Since 2005 he is working at Empa and lecturing at EPFL. His current research interests comprise the synthesis of novel low dimensional materials (multilayers of metals, oxides, nanoparticles) using state of the art deposition techniques and the combination of them, like atomic layer deposition, molecular layer deposition, physical vapor deposition, and gas-assisted focused electron and ion beam additive manufacturing at sub-micron scale. His achievements include a new temperature-step ALD process for conformal coatings on chemically inert substrates, the development of continuum models for growth rates in high-aspect ALD/MLD and FEBID/FIBID, and novel gas injection systems for pure metal deposition by non-thermal electron induced dissociation of adsorbates. He is the author of a well cited review and co-editor of a comprehensive book on the use of focused electron and ion beams for nanostructuring comprising theoretical and practical aspects, co-author of book chapters on atomic layer deposition in energy conversion applications and helium ion microscopy. He published more than 100 publications and organized several international conferences and workshops.

Professional expertise

Thin Films: MLD, ALD, PVD, LPE *** 3D Nanoprintig: FEBIP, FIBIP *** Materials: Ox-ides, Metals, Nanocomposites, Multilayers *** Science: Surfaces & Interfaces, Thermody-namics & Growth Kinetics, Materials Design.


German, English, French